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Equipments

공동 연구 청정실  (Konkuk Nanofabrication Lab)

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RIE.jpg
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E-beam evaporator

Atomic layer deposition system (ALD)

Reactive ion etching (RIE)

Critical Point Dryer
(CPD)

항온항습실
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​화학 공정 및 바이오 실험

Clean room 2
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Scanning Electronic Microscope (SEM) &
E-beam lithography (EBL)

Photolithography (PL)

과학관 (503호, 504호)

증착장비
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MBE.jpg
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Pulsed Laser Deposition (PLD)

Molecular Beam Epitaxy (MBE)

Excimer Laser System

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Sputter.jpg
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Rapid Thermal Annealing

측정장비
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XRD.jpg
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Probe-station & External instruments

High Resolution X-ray Diffractometer (HR-XRD)

Physical properties measurement system(PPMS)

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Wire-bonder

Atomic Force Microscopy (AFM)
Seiko | EFM, C-AFM, NC-AFM, etc.

Atomic Force Microscopy (AFM)
Park systems | C-AFM, NC-AFM, MFM, PFM etc.

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